By Weilie Zhou
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Extra resources for Advanced scanning microscopy for nanotechnology techniques and applications
Michael, Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edn, Kluwer Academic/Plenum Publishers, New York (2003). 6. C. W. Oatley, The Scanning Electron Microscope, Cambridge University Press, Cambridge (1972). 7. J. I. Goldstein and H. Yakowitz, Practical Scanning Electron Microscopy, Plenum Press, New York (1975). 40 Weilie Zhou et al. 8. Y. X. Chen, L. J. Campbell, and W. L. Zhou, J. Cryst. Growth, 270 (2004) 505. 9. J. J. Liu, A. West, J. J. Chen, M. H. Yu, and W. L. Zhou, Appl. Phys.
Improvement in speed has been made over the years, from manual indexing rates to 100 automatically indexed patterns/second (Fig. 11) . The rate of change approximates an exponential increase since inception (Fig. 12). Detectors used in normal SEM imaging produce a single dimensional output signal. With the beam at a given point on the sample, a signal is recorded and interpreted as the brightness in the output image. However, EBSD gives rise to a 3D pattern emanating from a point that is recorded in 2D on the phosphor screen.
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